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EPA/OAR RIN: 2060-AU56 Publication ID: Fall 2020 
Title: National Emission Standards for Hazardous Air Pollutants: Semiconductor Manufacturing Residual Risk and Technology Review 
Abstract: This action would address the agency's residual risk and technology review (RTR) of the National Emission Standards for Hazardous Air Pollutants (NESHAP) for Semiconductor Manufacturing. The semiconductor manufacturing NESHAP, 40 CFR part 63, subpart BBBBB was promulgated pursuant to section 112(d) of the Clean Air Act (CAA) on May 22, 2003 and amended on July 22, 2008. The NESHAP established emission limitations based on maximum achievable control technology (MACT) for controlling emissions of hazardous air pollutants (HAP) from storage tank and process vents. The HAP emitted from storage tank and process vents include hydrochloric acid, hydrogen fluoride, glycol ethers, methanol and xylene. This action would implement the residual risk review requirements of CAA section 112(f)(2) and the technology review requirements of CAA section 112(d)(6). The statute directs the EPA to promulgate emission standards under CAA section 112(f)(2) if such standards are required to provide an ample margin of safety to protect public health or to prevent, taking relevant factors into account, an adverse environmental effect. Any such standards are to be promulgated within 8 years after promulgation of MACT standards under CAA section 112(d). CAA section 112(d)(6) requires the EPA to review and revise the MACT standards as necessary, taking into account developments in practices, processes and control technologies, no less often than every 8 years. Pursuant to a court order (Community In-Power and Development Association v. Pruitt, No. 16-cv-1074KBJ (D.D.C. 2018)), the EPA is obligated to complete this final action by October 1, 2021. 
Agency: Environmental Protection Agency(EPA)  Priority: Substantive, Nonsignificant 
RIN Status: Previously published in the Unified Agenda Agenda Stage of Rulemaking: Proposed Rule Stage 
Major: No  Unfunded Mandates: No 
EO 13771 Designation: Not subject to, not significant 
CFR Citation: 40 CFR 63   
Legal Authority: 42 U.S.C. 7412 Clean Air Act   
Legal Deadline:
Action Source Description Date
Final  Judicial  16-cv-01074-KBJ; 3/31/18.  10/01/2021 
Timetable:
Action Date FR Cite
NPRM  12/00/2020 
Final Rule  10/00/2021 
Regulatory Flexibility Analysis Required: No  Government Levels Affected: None 
Small Entities Affected: No  Federalism: No 
Included in the Regulatory Plan: No 
RIN Data Printed in the FR: No 
Agency Contact:
Keith Barnett
Environmental Protection Agency
Office of Air and Radiation
D243-04,
Research Triangle Park, NC 27711
Phone:919 541-5605
Fax:919 541-4991
Email: barnett.keith@epa.gov