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Agenda
Reg Review
ICR
ICR Documents
Supporting Statement A
Document
Date Uploaded
0693.0033.SuppStmt-7-16-09.doc
07/29/2009
Supporting Statement B
Document
Date Uploaded
Supplementary Documents
Title
Document
Document Type
Date Uploaded
Four Standard Questions
TEMPLATE-0033-FourStandardSurveyQuestions.doc
Supplementary Document
07/16/2009
Nanoimprint Lithography Materials & Metrology Needs (MIL)
NIL Survey Questions.doc
Supplementary Document
07/28/2009
IEC Technical Committee 113 Nano-electro-technology
Nano-electro-technology Survey.doc
Supplementary Document
07/28/2009
Public Comments
Author Name
Comment Document
Author Affiliation
Sponsoring Org.
Type
Category
Date of Comment
Date Comment Received
Blank fields in records indicate information that was not collected or not collected electronically prior to July 2006.
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